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Excimer laser

We offer a wide range of laser output and energy options with excellent quality and performance!

Our high-energy UV pulses from the "Excimer Laser" can be utilized in microelectronics, displays, scientific research, medical applications, and thin film processing. We can accommodate the appropriate output levels from prototype to mass production. The uniform large-area flat-top beam covers the sample surface. Additionally, selective irradiation of laser energy is possible through low-temperature thin film processing. 【Features】 ■ Processing with large field sizes ■ Adjustable UV output ■ Selective irradiation of laser energy with low-temperature thin film processing ■ 50 years of experience with excimer lasers ■ A wide range of laser output and energy options available *For more details, please refer to the PDF document or feel free to contact us.

Related Link - https://www.coherent.com/ja/lasers/excimer

basic information

【Lineup】 ■ExciStar (High repetition frequency: up to 1kHz) ■IndyStar (High pulse rate: 24 hours) ■COMPex (High energy: several hundred mJ) ■LEAP (Wide range of output level options) ■LAMBDA SX (High output: up to 600 watts) ■VYPER (Ultra high output: up to 3600 watts) *For more details, please refer to the PDF materials or feel free to contact us.

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Applications/Examples of results

【Applications】 ■ Microelectronics, Displays, Scientific Research, Medical, Thin Film Processing *For more details, please refer to the PDF document or feel free to contact us.

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