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Excimer UV System

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Excimer UV System

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Unique high-energy UV excimer laser! Utilizes the same technology as high-performance mobile displays.

With 50 years of experience in UV lasers and optical systems, our company is well-versed in the challenges of managing, shaping, and focusing excimer laser beams. Our long-lasting lasers, optics, and structures help mitigate risks, allowing for operation 24 hours a day, 365 days a year. We employ the same enabling technologies used in high-performance mobile displays. Additionally, we leverage vertical integration to design, manufacture, and assemble the entire system to meet stringent standards. **Features** - Vertical integration - Proven industrial tools - Options available for 193nm, 248nm, and 308nm systems, as well as custom 157 or 351nm options - Maximizing the use of our unique high-energy UV excimer lasers with a complete optical system configured for applications such as LTPS, LLO, LIFT, PLD, and LA-ICP-MS *For more details, please refer to the PDF document or feel free to contact us.*

Related Link - https://www.coherent.com/ja/machines-systems/uv-la…

basic information

【Lineup】 ■ UVtransfer (Value combining three elements - Supports all three processes with one system) ■ LineBeam (Long line beam - Up to 1500mm) ■ UVblade (High uniformity - 1.8%) ■ Excimer beam transmission optics (Beam uniformity - Flow variation below 5%) ■ VarioLas (High energy density - Up to 7.5 [J/cm2]) ■ GeoLasHD (High optical resolution - 1µm) *For more details, please refer to the PDF document or feel free to contact us.

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For more details, please refer to the PDF document or feel free to contact us.

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Coherent Corp. is a global leader in materials, networks, and lasers for the industrial, communications, electronics, and embedded device markets. Its headquarters is located in Saxonburg, Pennsylvania. Founded in 1971, it was established to manufacture high-quality materials and optical components for industrial lasers. Today, it operates in over 20 countries worldwide. Coherent is focused on realizing innovations that respond to market megatrends while pursuing its mission of "creating a safer, healthier, more accessible, and more efficient world." Coherent empowers market innovators to define the future through groundbreaking technology, from materials to systems. We assist in product selection tailored to your specific case. Please feel free to contact us.

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