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Deaeration Module - High Capacity Fluororesin Hollow Fiber Membrane [Compatible with Chemical Solutions]

The membrane material is fluororesin, which has excellent chemical resistance and heat resistance, making it suitable for degassing solvent-based liquids.

A number of PTFE hollow fiber membranes with good gas permeability are bundled together and placed in a chamber, and by creating a vacuum inside, gases dissolved in the liquid flowing through the Teflon tube are removed. Since the membrane material is fluororesin, it has excellent chemical resistance and heat resistance, making it suitable for degassing solvent-based liquids. Additionally, because it is a non-porous membrane, it has excellent liquid barrier properties, preventing liquid from penetrating to the vacuum side. All contact parts are made from fluororesin materials. ■Capacity: 5 types ranging from 70 to 650 ml ■Initial degassing efficiency: 80% at a flow rate of 100 ml/min for a capacity of 650 ml [We offer degassing modules tailored to our customers' needs, so please feel free to contact us.] *For more details, please download the catalog or contact us.

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basic information

For more details, please download the catalog or contact us.

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Model number/Brand name

SM Vacuum Module

Applications/Examples of results

● Degassing of chemical solutions used in semiconductor and LCD manufacturing processes Developer solutions, resist solutions, rinse solutions, etching solutions, plating solutions, ultra-pure water, etc. ● Degassing of precision coating liquids and printer inks Photographic sensitizing solutions, inks, etc. ● Removal of factors that negatively affect measurement values Degassing of sample liquids in liquid particle counters *For more details, please download the catalog or contact us.*

Compactly condensed with a variety of features: 'SM Tube'

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