Stepping motor vacuum type
Power source in a vacuum! Contributing to miniaturization and cost reduction of devices.
We would like to introduce our "Vacuum Type Stepping Motor." It is widely used in various applications such as sputtering in semiconductor manufacturing equipment and measurement instruments including electron microscopes, and it is also possible to design multi-axis stages. Since the motor can be installed inside the vacuum chamber, it allows for miniaturization of the equipment without the need for rotating introduction devices. 【Features】 ■ Achieves various movements ■ Contributes to equipment miniaturization and cost reduction ■ Designed with consideration for contamination prevention inside the vacuum chamber *For more details, please download the PDF or feel free to contact us.
basic information
【Lineup】 ■αSTEP AR Series ■5-Phase Stepper Motor PK Series *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.
