Thermal chiller for the semiconductor industry
The refrigerant used is non-toxic and non-flammable, so there are no air transport restrictions! It is possible to refill the circulating liquid from the front.
We would like to introduce our thermochillers designed for the semiconductor industry. These chillers are compatible with non-fluorinated (CO2 refrigerant) and feature a slim design that allows for efficient placement. They do not require simple inspections based on the Fluorocarbon Emission Control Law. Additionally, there are no costs for the recovery or disposal of fluorocarbons. 【Features】 ■ GWP: 1 ■ Air transportable ■ 21% reduction in footprint ■ Improved workability ■ Zero fluorocarbon management workload ■ Zero costs for fluorocarbon recovery and disposal *For more details, please download the PDF or feel free to contact us.
basic information
【Specifications】 ■ Refrigerant used: CO2 (R744) ■ Standards: SEMI/CE/UL *For more details, please download the PDF or feel free to contact us.
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For more details, please download the PDF or feel free to contact us.