フローベル Official site

Bilateral Microscope System "TOMOS-50"

Introducing the front and back misalignment / dimensional measurement microscope. Achieved high precision at a low cost.

The "TOMOS-50" is a compact type of measurement system that can simultaneously capture the front and back of electronic components such as crystal oscillators, MEMS, and semiconductors, and measure with an accuracy of ±0.2μm or less. The front and back optical axis correction can be precisely adjusted using a micro stage and software. Additionally, it is also available for sale as a dual-sided microscope module for device integration. Please contact us for more information. 【Features】 ■ Compact type ■ Approximately 3 million pixels ■ Simultaneous capture of both sides, dimensional measurement, and position deviation measurement ■ High-precision correction of the front and back optical axis using a micro stage and software ■ Measurement of position deviation between front and back with a repeatability of ±0.2μm or less (varies depending on conditions) *For more details, please refer to the PDF document or feel free to contact us.

Related Link - https://flovel.co.jp/tomos-50.html

basic information

【Specifications (Partial)】 ■Optical System  ・Body Tube: 2 (Inverted, Upright)  ・Objective Lenses: 2 (Selectable from 5x, 10x, 20x, 50x)  ・Z Coarse and Fine Adjustment: Manual (Inverted, Upright) ■Measurement Section  ・Measurement Reproducibility: ±0.2μm or less (varies depending on measurement conditions)  ・PC OS: Windows 10  ・Display Monitor: Dual Screen Display ■Software  ・Front and Back Optical Axis Correction Function  ・Simultaneous Front and Back Imaging, Image Filing  ・Front and Back Dimension Measurement  ・Front and Back Position Displacement Measurement, etc. *For more details, please refer to the PDF document or feel free to contact us.

Price range

Delivery Time

Applications/Examples of results

【Applications】 ■Observation: Simultaneous observation of the front and back of electronic paper, electrophoresis, particles, fluids, filters, etc. ■Front and back positional displacement measurement: Measurement of positional displacement of inkjet nozzles, quartz oscillators, MEMS, etc. ■Front and back dimensional measurement: Dimensional measurement of quartz oscillators, semiconductor linewidth patterns, etc. *For more details, please refer to the PDF document or feel free to contact us.

Bilateral Microscope System "TOMOS-50"

PRODUCT

Recommended products

Distributors