Micro Line Width Measurement System 'VP-5LW'
Easy operation and standard high-precision AF function! Measures small line widths with a repeatability of 3σ=10nm.
The "VP-5LW" is an all-in-one micro line width measurement device equipped with a Z-axis stage motor output driver, autofocus function, measurement software, and Windows OS. It measures the micro line widths of semiconductor wafers and liquid crystal color resists with a repeatability accuracy of 3σ=10nm (at 100x magnification). Depending on the type of line, various edge detection specifications can be set, and it is possible to measure vertically to the detected line even if the line is tilted. *Please note that there may be a certain period required before delivery. 【Features】 ■ Standard AF function ■ 3 million pixel monochrome camera ■ Proprietary AF image processing unit ■ Various edge detection specifications can be set according to the type of line *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications (Partial)】 ■ Digital Image Measurement Device - Measurement Contents: Line Width, Circle Diameter ■ Measurement Reproducibility: 3σ=0.01μm (Measured repeatedly using a 100x objective and reference scale in AF operation) ■ Minimum Display: 0.001μm ■ Line Width Edge Detection: Options available for Negative, Positive, Inner-Inner, Outer-Outer, Inner-Outer, Bottom-Bottom, etc. ■ Calibration Values: Up to 20 types can be registered according to lens magnification ■ Data Output: Capability to save measurement results as CSV data and measurement result images (BMP/JPG) *For more details, please refer to the PDF document or feel free to contact us.
Price range
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Applications/Examples of results
【Usage】 ■Micro line width measurement *For more details, please refer to the PDF document or feel free to contact us.
