Bilateral Microscope System "TOMOS-60XY"
Equipped with XY electric stage and autofocus function! Customization for software and more is also supported.
The "TOMOS-60XY" is a 6-inch electric XY stage dual-sided microscope system that can automatically measure multiple locations on a workpiece. It can automatically move to the specified measurement locations on the workpiece and measure the displacement of patterns and alignment marks on the front and back of quartz oscillators, MEMS, semiconductor wafers, and electronic components. Additionally, it is equipped with an alignment function for correcting the positional deviation between the XY stage and the workpiece, ensuring precise movement control and preventing measurement errors. 【Features】 ■ Automatically detects the edges of alignment marks such as circles, squares, and crosses, and measures the displacement between their center coordinates. ■ Controls XYZ stage conditions, measurement conditions, creates maps, and registers recipes to automatically measure multiple locations on the workpiece. *For more details, please download the PDF or feel free to contact us.
basic information
【Software Features】 ■ Front and rear optical axis correction ■ Front and rear lens magnification correction ■ Camera mounting angle correction ■ Simultaneous front and rear imaging, filing ■ Automatic measurement of front and rear positional deviation ■ Electric stage control, map creation ■ Movement alignment correction ■ Continuous movement operation measurement ■ Automatic measurement of front and rear dimensions (optional) *For more details, please download the PDF or feel free to contact us.
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Applications/Examples of results
For more details, please download the PDF or feel free to contact us.
