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This is a flow control device that adopts a pressure control method for ultra-high purity applications.

1. The control flow is not affected by fluctuations in supply pressure. 2. Fast response time (less than 0.5 seconds) 3. Excellent accuracy (within ±1.0% S.P. for standard type) 4. Equipped with MGMR (Multi-Gas Multi-Range) function 5. Not affected by installation position. 6. Equipped with flow self-diagnosis function 7. Does not select gas types 8. RoHS compliant

This is a flow control device that adopts a thermal flow sensor control method.

Achieved further total cost reduction and shortened lead time Mass flow controller equipped with a digital interface 【Features】 ○ High precision Flow accuracy of ±1% achieved ○ High-performance sensor Adoption of low-temperature flow sensors realizes optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve minimizes contact gas area and prevents particle generation Equipped with high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.

The <FINE series PURE> is a highly pure, integrated gas system.

<Flow of IGS Panel Completion> 1. IGS Design 2. Component Selection and Arrangement 3. Base Block Setup 4. Upper Equipment Installation 5. Construction Completion

The <New V-Series> is a tube connector with excellent performance and quality.

<Specifications> Maximum operating pressure (MPa): 12 to 83.2 Operating fluid temperature range (°C): -196 to +537 Main material: Stainless steel Connection method: 2 compression ring type Nominal diameter: 1.6 mm to 25.4 mm

<FINE series PURE> is a direct diaphragm valve for ultra-high purity use.

<Specifications> Maximum Operating Pressure (MPa): 1/20.5 Operating Fluid Temperature Range (°C): -10 to +80 / -10 to +40 Key Material: Stainless Steel Connection Method: Union Type / 2 Compression Ring Type / Welding Type Nominal Diameter: 6.35 mm to 12.7 mm

<FINE series PURE> is a metal gasket type fitting for ultra-high purity applications.

<Specifications> Maximum operating pressure (MPa): 10/16.2/21.5 Operating fluid temperature range (°C): -196 to +450 Main material: Stainless steel Connection method: Union gasket type Nominal diameter: 3.2 mm to 19.05 mm

This is a super high purity, ultra-small metal gasket type joint for ultra-high purity use.

<Specifications> Maximum operating pressure (MPa): 21.5 Operating fluid temperature range (°C): -196 to +450 Key material: Stainless steel Connection method: Union gasket type Nominal diameter: 3.2 mm to 12.7 mm