[Exhibition] 9/18 to 9/20 "VACUUM2024 Vacuum Exhibition" Exhibition Information

Fujikin Incorporated

We will be exhibiting at Japan's largest vacuum equipment and vacuum device comprehensive exhibition, "VACUUM2024." At our booth, we will showcase a variety of products suitable for vacuum lines that require ultra-high purity and high airtightness, including the mass flow controller "FCS Pressure Series." Scheduled products for exhibition: - FCS Pressure Series - FCS Thermal Series - Integrated Gas System (IGS) - New V-Lok - PURE Series, etc. ★ A special campaign is currently underway for "CLUB FUJIKIN" members, where you can receive handy goods just for visiting! Please take this opportunity to register and come see us!

Date and time Wednesday, Sep 18, 2024 ～ Friday, Sep 20, 2024
10:00 AM ～ 05:00 PM
Capital Tokyo Big Sight V-14
Entry fee Free Advance registration is required for attendance.

Related product information

System [Flow Control Device] FCS Pressure Series
This is a flow control device that adopts a pressure control method for ultra-high purity applications.

1. The control flow is not affected by fluctuations in supply pressure. 2. Fast response time (less than 0.5 seconds) 3. Excellent accuracy (within ±1.0% S.P. for standard type) 4. Equipped with MGMR (Multi-Gas Multi-Range) function 5. Not affected by installation position. 6. Equipped with flow self-diagnosis function 7. Does not select gas types 8. RoHS compliant
System [Flow Control Device] FCS Thermal Series
This is a flow control device that adopts a thermal flow sensor control method.

Achieved further total cost reduction and shortened lead time Mass flow controller equipped with a digital interface 【Features】 ○ High precision Flow accuracy of ±1% achieved ○ High-performance sensor Adoption of low-temperature flow sensors realizes optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve minimizes contact gas area and prevents particle generation Equipped with high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.
System [Integrated Gas System] IGS(FS)
The <FINE series PURE> is a highly pure, integrated gas system.

<Flow of IGS Panel Completion> 1. IGS Design 2. Component Selection and Arrangement 3. Base Block Setup 4. Upper Equipment Installation 5. Construction Completion
【2 Compression Ring Type Joint】 New V-Lok
The <New V-Series> is a tube connector with excellent performance and quality.

<Specifications> Maximum operating pressure (MPa): 12 to 83.2 Operating fluid temperature range (°C): -196 to +537 Main material: Stainless steel Connection method: 2 compression ring type Nominal diameter: 1.6 mm to 25.4 mm
Valve [Metal Diaphragm Valve] NEW MEGA series (F)
<FINE series PURE> is a direct diaphragm valve for ultra-high purity use.

<Specifications> Maximum Operating Pressure (MPa): 1/20.5 Operating Fluid Temperature Range (°C): -10 to +80 / -10 to +40 Key Material: Stainless Steel Connection Method: Union Type / 2 Compression Ring Type / Welding Type Nominal Diameter: 6.35 mm to 12.7 mm
Union gasket type joint UJR joint (FS)
<FINE series PURE> is a metal gasket type fitting for ultra-high purity applications.

<Specifications> Maximum operating pressure (MPa): 10/16.2/21.5 Operating fluid temperature range (°C): -196 to +450 Main material: Stainless steel Connection method: Union gasket type Nominal diameter: 3.2 mm to 19.05 mm
Union gasket type joint UPG joint (FS)
This is a super high purity, ultra-small metal gasket type joint for ultra-high purity use.

<Specifications> Maximum operating pressure (MPa): 21.5 Operating fluid temperature range (°C): -196 to +450 Key material: Stainless steel Connection method: Union gasket type Nominal diameter: 3.2 mm to 12.7 mm