15 consecutive years of awards! We received the 2018 "Super" Monozukuri Parts Award.

Fujikin Incorporated

At the 15th "Super" Monozukuri Parts Awards (organized by the Monozukuri Japan Conference and Nikkan Kogyo Shimbun), Fujikin's next-generation diaphragm valve for semiconductor processes received the Electric and Electronic Components Award. This product is used in gas supply systems that provide process gases such as organometallics to film deposition and etching equipment in the front-end processes of semiconductor manufacturing. As semiconductor integration advances, valves are required to have greater durability and flow accuracy than ever before. By innovating the diaphragm material, the shape, material, and design of the components that hold and press the diaphragm, we successfully developed a diaphragm valve for next-generation semiconductor processes.