[News Release] Awarded for 18 consecutive years! We have received the "Super" Manufacturing Parts Award in the Machinery and Robot Parts category!

Fujikin Incorporated

Thanks to your support, we have received the "Super" Monozukuri Parts Award for 18 consecutive years. In 2021, at the 18th "Super" Monozukuri Parts Award, the "Pressure-Controlled Ultra-High-Precision Gas Flow Controller (FCS-P8500)" won the "Mechanical and Robot Parts Award." Thank you very much. The "Pressure-Controlled Ultra-High-Precision Gas Flow Controller (FCS-P8500)" is a newly developed flow controller by Fujikin for semiconductor manufacturing processes. It expands the rangeability by 10 times while maintaining the same housing size as conventional models and improves flow control accuracy by 40 times. Product details will be published on our website as they become available!

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System [Flow Control Device] FCS Pressure Series
This is a flow control device that adopts a pressure control method for ultra-high purity applications.

1. The control flow is not affected by fluctuations in supply pressure. 2. Fast response time (less than 0.5 seconds) 3. Excellent accuracy (within ±1.0% S.P. for standard type) 4. Equipped with MGMR (Multi-Gas Multi-Range) function 5. Not affected by installation position. 6. Equipped with flow self-diagnosis function 7. Does not select gas types 8. RoHS compliant
System [Flow Control Device] FCS Thermal Series
This is a flow control device that adopts a thermal flow sensor control method.

Achieved further total cost reduction and shortened lead time Mass flow controller equipped with a digital interface 【Features】 ○ High precision Flow accuracy of ±1% achieved ○ High-performance sensor Adoption of low-temperature flow sensors realizes optimal structure for highly reactive gases and gases with low stability ○ High-reliability diaphragm valve minimizes contact gas area and prevents particle generation Equipped with high-speed response piezo actuators Significant improvement in gas replacement characteristics due to dead space-free structure Minimal particle generation ○ Standard digital interface RS485 ○ RoHS compliant ● For other functions and details, please download the catalog.