Piezo-resistive ceramic pressure sensor 'ME500'
Due to its high robustness, it is suitable for water level measurement in harsh outdoor environments such as on ships.
The "ME500" is a pressure sensor that employs a piezoresistive method. It features thermal compensation using a laser-adjustable PTC resistor, and due to its ceramic construction, it achieves high linearity across the entire range. Made of Al2O3 (alumina) ceramic, it can also accommodate sapphire specifications (upon consultation). As a result, it exhibits excellent chemical resistance, robustness, and biocompatibility. It is capable of measuring the flow of various solutions used in semiconductor manufacturing equipment and food production equipment, as well as alkaline liquids and corrosive gases. 【Pressure Range】 ■ 0.5 to 800 [bar] ■ 7 to 11,600 [psi] ■ 0.05 to 80 [MPa] *For more details, please download the PDF (English version) or feel free to contact us.
basic information
【Features】 ■Product diameter: φ18.0mm ■Excellent durability, corrosion resistance, and wear resistance ■Alumina 96%・High purity alumina 99.6%・Custom sapphire available ■Gauge pressure, absolute pressure, shielded gauge pressure ■Compliance standards: REACH, RoHS *For more details, please download the PDF (English version) or feel free to contact us.
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【Applications】 ■ Semiconductor manufacturing equipment ■ Flow measurement devices ■ Food manufacturing equipment ■ Agricultural measurement devices ■ Medical measurement devices ■ Immersion type water level gauge ■ Chemical pressure gauge *For more details, please download the PDF (English version) or feel free to contact us.
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