Ceramic Pressure Sensor "ME600"
This product is suitable for semiconductor and vacuum process applications that require high reliability!
The "ME600" is a ceramic pressure sensor that employs a piezoresistive method. Thanks to thick-film technology, a Wheatstone bridge is directly formed on one side of the ceramic diaphragm. This achieves high stability and excellent reproducibility. It adopts a monolithic structure where the diaphragm and the outer support are integrated, eliminating joints, which makes it strong against pressure loads and ensures high reliability and long lifespan. 【Features】 ■ Output: Differential mV/V ■ Product diameter: φ18.0mm ■ Excellent corrosion resistance, chemical resistance, mechanical strength, biocompatibility, and wear resistance ■ Al2O3 (alumina) 96% ■ Gauge pressure compatible *For more details, please download the PDF (English version) or feel free to contact us.
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For more details, please download the PDF (English version) or feel free to contact us.
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【Applications】 ■ Hydrogen gas measurement ■ Semiconductor manufacturing equipment ■ Vacuum processes ■ Chemical and pharmaceutical processes ■ Medical measurement devices *For more details, please download the PDF (English version) or feel free to contact us.
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