Ceramic Pressure Sensor "ME657"
High stability and reproducibility are ensured by temperature compensation using a thick-film Wheatstone bridge and PTC resistors!
The "ME657" is an ultra-compact ceramic pressure sensor that simultaneously achieves "miniaturization," "high reliability," and "harsh environment compatibility." It is designed for long-term stable measurement in high-pressure, corrosive gas, and hydrogen environments within limited spaces, as required in semiconductor devices and vacuum/gas processes. The Al2O3 (alumina) ceramic diaphragm prevents corrosion and hydrogen embrittlement, while suppressing degradation and drift that can be problematic with metal diaphragms. 【Features】 ■ Differential mV/V output ■ Compact pressure sensor with a diameter of 12.85 mm ■ Excellent corrosion resistance, chemical resistance, mechanical strength, biocompatibility, and wear resistance ■ Gauge pressure compatible *For more details, please download the PDF (English version) or feel free to contact us.
basic information
【Pressure Range】 ■0 to 350 bar ■0 to 35 MPa ■0 to 5,076 psi *For more details, please download the PDF (English version) or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Semiconductor manufacturing equipment ■ Hydrogen-related equipment ■ Vacuum pumps and vacuum processes ■ Analytical instruments and process measurement ■ Pressure sensors ■ Other liquid pressure gauges, etc. *For more details, please download the PDF (English version) or feel free to contact us.
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