[Book] Latest Trends in Advanced Semiconductor Manufacturing Processes and Miniaturization Technology (No. 2220)
TECHNICAL INFOMATION INSTITUTE CO.,LTD
- Film formation technology, lithography, etching, CMP, cleaning - ★ Amid calls for the limits of Moore's Law, how far will the development of miniaturization technology continue!? A comprehensive book covering the latest technologies in advanced semiconductor manufacturing "front-end processes" with the application of new structures and new materials. ---------------------------- ■ Table of Contents Chapter 1: Polishing and processing technologies for semiconductor wafers and ion implantation Chapter 2: Development trends in film formation technology and the production of high-quality thin films Chapter 3: Development trends in resist materials and coating and removal technologies Chapter 4: Development trends in next-generation lithography technology and miniaturization technology Chapter 5: Development trends in dry etching technology and process control Chapter 6: Development trends in wet etching technology Chapter 7: Development trends in CMP processes and analysis and evaluation technologies Chapter 8: Semiconductor cleaning technologies, mechanisms, and analysis and evaluation technologies ---------------------------- ● Publication Date: September 29, 2023 ● Format: A4 size, 630 pages ● Authors: 58 individuals ● ISBN: 978-4-86104-982-8 ----------------------------
