Standard sample for Al・Mo・Mo/Al/Mo multilayer film
It etches single films of Al, Al alloys, or Mo, Mo alloys, as well as layered films such as Mo/Al/Mo and Mo alloy/Al alloy/Mo alloy effectively.
The features of this product are as follows: - It forms a good positive taper. - It has minimal side etching, allowing for the formation of fine patterns. - The etching speed and in-plane uniformity of the etching shape are excellent. Keywords: wet etching, aluminum, molybdenum, AlCu, MAM, multilayer film
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