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Selectable image resolution! Wafer chip appearance inspection device (after dicing)

Equipped with a variety of functions! Inspections are conducted using a 3CMOS color area camera with 3.2 million pixels.

The "Wafer Chip Appearance Inspection Device (Post-Dicing)" is a device for inspecting the appearance of chips after wafer dicing. Image resolution can be selected according to inspection accuracy (approximately 0.8μm to 2.0μm/pixel). Additionally, optional features include simultaneous front and back inspection, NG chip reject function, NG chip marking function, elimination of all errors, marking error check function, ID reading, and mapping data output function. 【Features】 ■ Multifunctional image inspection software Hu-Dra ■ A two-stage specification that allows for simultaneous appearance inspection and NG rejection is also available ■ Processing capabilities - Appearance inspection time: approximately 2 minutes at a resolution of 1.5μm (2-inch: chip size approximately 1mm) - Elimination time: 3 to 6 chips per second (varies depending on chip size and type of sheet) - Marking time: 3 to 4 chips per second for inker *For more details, please refer to the PDF document or feel free to contact us.

Here is the HP of Hubrain.

basic information

【Device Specifications (Example)】 ■Camera  ・3CMOS Color Area Camera with 3.2 Megapixels (Inspection)  ・16,000 Pixel Monochrome Line Camera (Press Can) ■Device Size  ・1,450W × 1,640D × 1,800H mm  ・Excluding Patlite and HEPA *For more details, please refer to the PDF document or feel free to contact us.

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Applications/Examples of results

【Inspection Items】 ■Dicing defects (cracks, chips), scratches, discoloration, foreign substances, pattern misalignment, pattern missing, residual resist, coating defects, etc. *For more details, please refer to the PDF document or feel free to contact us.

Wafer chip appearance inspection device (after dicing)

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Wafer Appearance Inspection Device (Before Dicing)

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