X-ray observation device 'LX-1610'
The world's smallest class of X-ray focal dimensions! High-function observation and automatic inspection are possible with 6-axis control.
This product is an analytical X-ray observation device with a high resolution of 0.25μm X-ray focal size. It uses a 160kV, 0.2mA, open-type micro-focus X-ray tube and a transmission-type target. With 6-axis control, it enables high-function observation and automatic inspection. 【Features】 ■ 160kV, 0.2mA, open-type ■ Uses a micro-focus X-ray tube ■ One of the smallest X-ray focal sizes in the world (0.25μm) ■ X-ray magnification: 2,000 times ■ Uses a transmission-type target ■ Equipped with a 2.8 million pixel X-ray digital I.I. tube *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Other Features】 - High-function observation and automatic inspection possible with 6-axis control - Equipped with a 360° rotating turntable, automatic sample position correction - Camera with a 60° tilt function, automatic sample position correction - Automatic inspection function, void inspection, bridge inspection - Built-in PC, 24-inch LCD, keyboard included - Compatible with 12-inch silicon wafers *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
