【Product Information】Metal Seal Mass Flow Controller/ Meter 'GF125 Series'

ITWジャパン
"MFC equipped with PTI (Pressure Variation Resistance)" The 'GF125 series,' featuring ultra-fast response and high cleanliness, is a metal-sealed mass flow controller equipped with second-generation PTI (Pressure Variation Resistance). It significantly reduces the impact of inlet pressure fluctuations on process gas flow rates. The MultiFlo technology, standard in the GF125, allows for thousands of combinations of gas types and ranges without disconnecting the flow meter from the gas line or compromising accuracy. This feature contributes to reducing the size and cost of gas panels by reviewing pressure regulators, pressure transducers, and related hardware installed in the process line, alongside industry-leading PTI performance that maximizes yield and productivity. Applications: ■ Semiconductor etching tools ■ MOCVD ■ Gas flow control applications requiring high-purity all-metal flow paths
