Mass Flow Controller/ Meter "4800 Series"
Ultra-fast response for flow processes focused on speed! Suitable for a wide variety of non-corrosive gases.
The "4800 Series" is a thermal mass flow controller/meter with elastomer seals that improves process efficiency and productivity as response time improves. The advanced MEMS thermal sensor is equipped with a dedicated PID algorithm optimized for response to the control valve, allowing the product to quickly follow the actual flow rate even when the set point is changed arbitrarily. 【Features】 ■ Flow response time (settling time) of 0.75 seconds or less ■ Innovative MEMS sensor and dedicated PID algorithm ■ Compact size, half that of conventional thermal MFCs ■ Digital compatibility via RS-232 ■ Optional Local Operator Interface (LOI) to streamline setup and operation *For more details, please refer to the related link page or feel free to contact us.
basic information
【Other Features】 ■ Suitable for a wide variety of non-corrosive gases ■ Fast response time ensures quick steps even during process recipe changes ■ Suitable for OEMs ■ Various communication options that can be tailored to user requirements *For more details, please refer to the related link page or feel free to contact us.
Price range
Delivery Time
Model number/Brand name
Model 4850 / 4860
Applications/Examples of results
【Applications】 ■ Heat treatment, cutting/welding, thermal processes ■ Solar/thin film physical vapor deposition (PVD) systems ■ Analytical devices for measuring and controlling reagent, calibration, and sample gas flow *For more details, please refer to the related link page or feel free to contact us.
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Solutions from Brooks Instrument that support a sustainable future.
Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.
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Proposal for support of the old mass flow called "Legacy."
Brooks Instrument provides support for all mass flow devices previously sold by various manufacturers, including Tylan General, Mykrolis, Entegris, UNIT, Kinetics, and Celerity, as shown in the "Brooks MFC Genealogy Chart" on the right. This accounts for approximately 80% of the legacy mass flow devices in the market. In response to customer requests, we may suggest repairs in some cases, and in others, we may recommend replacement with our best-selling mass flow devices, the GF120 or GF125. We have already replaced over 20,000 units from these legacy devices to the GF series. It is possible to replace nearly all models of legacy mass flow devices featured in the "Brooks MFC Genealogy Chart." If you are having trouble with repairs or replacements of legacy mass flow devices, please feel free to consult our sales department.
