Steam Supply Module "VDM300"
Achieving the highest flow accuracy in ultra-high purity DI steam supply.
The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-pure vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions and eliminates the influence of pure water, ensuring high reliability and cleanliness in manufacturing. An independent service port and an intuitive GUI (graphic user interface) provide user-friendly data logging and diagnostic capabilities. **Benefits** - Utilizes proven and reliable thermal mass flow measurement and control technology - Compatible with various water supply pressures - Enhanced corrosion resistance - Clean manufacturing - Tool interface using analog or digital communication - Direct interface for enhanced data collection or troubleshooting *For more details, please download the PDF or feel free to contact us.*
basic information
【Features】 ■Flow range: 3 slpm (DIW steam) ■Direct steam measurement achieving excellent flow accuracy ■Directly connects to pure water supply systems within the plant ■Operates even at the lowest temperature (non-superheated state) ■Optimally designed for washing and drainage ■EtherCAT digital communication ■Brooks Expert Support Tool (BEST) graphical interface *For more details, please download the PDF or feel free to contact us.
Price range
Delivery Time
Model number/Brand name
Model VDM300
Applications/Examples of results
[Applications] ■ Post-process for metal etching of silicon semiconductors ■ Metal strip process for silicon semiconductors ■ Ultra-high purity humidification in low atmospheric pressure environments *For more details, please download the PDF or feel free to contact us.
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News about this product（4）
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Brooks Expert Support Tool (BEST)
The Brooks Expert Support Tool 'BEST (Brooks Enhanced Support Tool)' is a Windows-based application software designed to control high-performance mass flow controllers, meters, and pressure controllers specifically for the SLA58XX and SLAMfXX series. By using this tool, you can utilize functions including setup, configuration, diagnostics, troubleshooting, valve adjustment, and calibration (a separate license key is required). You can access the diagnostic port located at the top of the device by connecting it to your computer with a dedicated cable. For specifications, licensing requirements, and operation methods, please contact us. Please check the following page for compatible products: https://www.brooksinstrument.com/ja-jp/products/accessories-software/product-software/brooks-expert-support-tool ■ Currently available versions V5.14.1.0 V5.12.0.0 V5.10.0.0
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Product Information: Steam Supply Module "VDM300"
"Achieving the highest flow accuracy in ultra-high purity DI steam supply" The Vapor Delivery Module (VDM) features an energy-efficient design that generates ultra-high purity vaporized gas even at low temperatures. It employs proven steam delivery technology and is equipped with advanced digital control and comprehensive diagnostic functions. Compared to flash vaporization systems, it achieves superior accuracy, high flow rates, a wide control range, and low power consumption. Based on proven thermal mass flow measurement technology, it generates steam even in non-heated conditions, eliminating the influence of pure water, thus ensuring high reliability and high purity manufacturing. An independent service port and intuitive GUI provide user-friendly data logging and diagnostic capabilities. Applications: ■ Post-process for metal etching of silicon semiconductors ■ Metal strip process for silicon semiconductors ■ Ultra-high purity humidification in low atmospheric pressure environments For more details, please visit https://www.brooksinstrument.com/ja-jp/products/vaporization/vapor-delivery-modules/vdm300
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Released the VDM300 Deionized Water Vapor Delivery Module.
The VDM300, designed for advanced stripping and passivation processes after metal etching, achieves superior accuracy, high flow rates, a wide control range, and low power consumption compared to flash vaporization systems. Features of the VDM300: 1. Flow range: 3 slpm (DIW vapor) 2. Direct steam measurement for excellent flow accuracy 3. Direct connection to the plant's pure water supply system 4. Operable even at minimum temperature (non-heated state) 5. Optimally designed for rinsing and drainage 6. EtherCAT digital communication 7. Brooks Expert Support Tool (BEST) graphical interface
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Proposal for support of the old mass flow called "Legacy."
Brooks Instrument provides support for all mass flow devices previously sold by various manufacturers, including Tylan General, Mykrolis, Entegris, UNIT, Kinetics, and Celerity, as shown in the "Brooks MFC Genealogy Chart" on the right. This accounts for approximately 80% of the legacy mass flow devices in the market. In response to customer requests, we may suggest repairs in some cases, and in others, we may recommend replacement with our best-selling mass flow devices, the GF120 or GF125. We have already replaced over 20,000 units from these legacy devices to the GF series. It is possible to replace nearly all models of legacy mass flow devices featured in the "Brooks MFC Genealogy Chart." If you are having trouble with repairs or replacements of legacy mass flow devices, please feel free to consult our sales department.
