Thermal Mass Flow Controller/ Meter "SLA5800 Series"
Acquisition of certification from the High Pressure Gas Safety Institute (KHK). Simplification of the completion inspection procedures in the prefectures. Also obtained the type approval certificate for domestic explosion-proof (JPEx).
The thermal mass flow controller/meter "SLA5800 series" is equipped with gas control and measurement functions that are useful for research and development of carbon neutrality, and is compatible with gases such as hydrogen, methane, LNG, carbon dioxide, and ammonia. The "SLA5850 mass flow controller with normally closed valve" has obtained certification from the High-Pressure Gas Safety Institute of Japan (KHK), allowing for a very smooth introduction as the completion inspection in prefectures can be completed with just the submission of the certification. (It is also possible to respond with a flow meter.) 【Features】 ■ Obtained type certification for domestic explosion-proof (JPEx) from DEKRA (Applicable products: mass flow controllers/meters, pressure controllers) ■ Active in fields such as chemicals, petrochemicals, fuel cells, and life sciences ■ Flow range that covers a wide spectrum ■ Capable of handling multiple gases and flow ranges with a single unit *For more details, please refer to the catalog. Feel free to contact us with any inquiries.
basic information
<Benefits of KHK Certified Products> High-pressure gas equipment requires administrative procedures such as permission applications, inspection applications, and notifications to the governor of the prefecture (or the mayor of the municipality). These administrative procedures involve the preparation of necessary documents and complicated procedures such as equipment testing. However, by simply submitting the high-pressure gas equipment test performance certificate issued by KHK, the administrative procedures can be completed.
Price range
Delivery Time
Model number/Brand name
Model SLA5850 / SLA5851 / SLA5853 / SLA5860 / SLA5861 / SLA5863
Applications/Examples of results
For more details, please refer to the catalog. Feel free to contact us as well.
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Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'
"Maximizing the Best Performance" This is the industry's first fully pressure-insensitive type of pressure-based mass flow controller (P-MFC) specifically designed for advanced etching and deposition processes in semiconductor manufacturing. The GP200 series P-MFC adopts a patented architecture that overcomes the limitations of conventional P-MFCs, enabling high-precision process gas supply even with low vapor pressure process gases. It also features a built-in differential pressure sensor and a unique design that places the valve downstream, allowing for high-precision process gas supply across the widest range of operating conditions in the industry. Due to its compatibility with a wide range of process conditions, it can be used as a replacement or upgrade for conventional P-MFCs and thermal MFCs. Additionally, by eliminating the need for components such as pressure regulators and converters, it simplifies the gas supply system and reduces costs. [Main Applications] ■ Semiconductor Manufacturing ■ Etching ■ CVD ■ Gas flow control applications requiring high-purity all-metal flow paths
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Product Information: Elastomer Seal Thermal Mass Flow Controller/ Meter "SLA5800 Series"
Model SLA5850/SLA5851/SLA5853/SLA5860/SLA5861/SLA5863 "With just one unit, you can use 14 types of pressure and flow rates in a single process." Imagine such a mass flow controller platform. Moreover, it features excellent reproducibility, precision, and repeatability. This is the evolved simple performance of the SLA5800 series mass flow controllers/meters. The SLA5800 series boasts high accuracy, zero point stability, and repeatability that are characteristic of Brooks Instrument, a leader in mass flow measurement and control technology. Equipped with configurable advanced multi-gas/multi-range capabilities, it offers superior zero drift specifications compared to competing products while demonstrating long-term maintenance of factory calibration and accuracy.
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[Video] Mass Flow Controller (MFC) 'SLA Series' Operating Principle
The operating principles of the SLA series are explained in the video. (English) https://www.youtube.com/watch?v=XKpX3rrt1qc Video Chapters 00:00 What is Brooks Instrument? 00:10 How to connect power to the thermal mass flow meter 00:24 Basic structure of the thermal mass flow meter 00:35 Diverting a portion of the gas flow with a laminar flow element 00:56 Measuring temperature difference with thermal sensors 01:08 Excellent sensor stability 01:37 How to measure process gas flow 02:17 Circuit board of the thermal mass flow meter 02:34 What are advanced alarm and diagnostic functions? <Main advantages of Coriolis flow meters> ■ Long-term stability of the sensor eliminates the need for maintenance or regular recalibration, reducing total ownership costs ■ Brooks Instrument's unique thermal sensor technology improves the S/N ratio and enhances flow accuracy at low set points.
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Solutions from Brooks Instrument that support a sustainable future.
Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.
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[Panel Material] Contributing to Scale-Up and Automation
■ Wide flow range/pressure conditions and support for digital I/O ■ Certificates and certifications ■ Applications Please take a look here. https://www.ipros.jp/catalog/detail/752600 You can also view it from related catalogs.
