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Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

Thin films, coatings, and surface treatments cover a wide range of industries and applications!

Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of plate glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, pressure measurement, and control devices cover PVD and CVD process applications. Additionally, our products are suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ High reproducibility and precision gas supply ■ Excellent quality, accurate thickness, and uniform film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield *For more details, please refer to the PDF document or feel free to contact us.

Related Link - https://www.brooksinstrument.com/ja-jp

basic information

【Lineup】 ■ Mass Flow Controllers for Gases and Liquids - SLA5800 Series IP40 - General-purpose Mass Flow - GF40 Series Compact Mass Flow - GF100 Series High Purity Mass Flow - Quantim Coriolis Mass Flow ■ Vacuum and Pressure Measurement and Control - XacTorr Series Capacitance Manometers - VersaTorr Series Pirani Vacuum Transducers - SolidSense II Pressure Transducer - SLA Series Pressure Controllers *For more details, please refer to the PDF materials or feel free to contact us.

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Applications/Examples of results

【Applications】 ■ Solar cell related ■ Medical device related ■ Diamond-like coating ■ Optical coating ■ Glass coating ■ Semiconductor related ■ Metal coating ■ Coating for construction ■ Coating for food packaging *For more details, please refer to the PDF document or feel free to contact us.

Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>

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[Published in Measurement Technology December 2022] Overview of the MEMS Pirani Vacuum Gauge VersaTorr Series and its Applications in Advanced Semiconductor Processes.

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