Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>
Thin films, coatings, and surface treatments cover a wide range of industries and applications!
Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of plate glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, pressure measurement, and control devices cover PVD and CVD process applications. Additionally, our products are suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ High reproducibility and precision gas supply ■ Excellent quality, accurate thickness, and uniform film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Lineup】 ■ Mass Flow Controllers for Gases and Liquids - SLA5800 Series IP40 - General-purpose Mass Flow - GF40 Series Compact Mass Flow - GF100 Series High Purity Mass Flow - Quantim Coriolis Mass Flow ■ Vacuum and Pressure Measurement and Control - XacTorr Series Capacitance Manometers - VersaTorr Series Pirani Vacuum Transducers - SolidSense II Pressure Transducer - SLA Series Pressure Controllers *For more details, please refer to the PDF materials or feel free to contact us.
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Applications/Examples of results
【Applications】 ■ Solar cell related ■ Medical device related ■ Diamond-like coating ■ Optical coating ■ Glass coating ■ Semiconductor related ■ Metal coating ■ Coating for construction ■ Coating for food packaging *For more details, please refer to the PDF document or feel free to contact us.
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Solutions from Brooks Instrument that support a sustainable future.
Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.
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Mass flow controller for gases and liquids <Vacuum and pressure measurement and control>
Surfaces of industrial and consumer products may be coated to optimize their finish. For example, it is possible to improve the wear resistance of cutting tools, scratch resistance of glass, thermal properties of sheet glass, and aesthetics of household appliances. There are various coating methods such as chemical vapor deposition, physical vapor deposition, plasma treatment processes, and thermal spraying, but they are often performed as the final stage of the manufacturing process. Brooks Instrument's mass flow, vacuum, and pressure measurement and control devices cover PVD and CVD process applications. They are also suitable for surface treatment applications such as heat treatment and plasma processing. 【Features】 ■ Highly reproducible, high-precision gas supply ■ Excellent quality, accurate thickness, uniformity of film thickness ■ Long-term stable process control ■ High-functionality flow diagnostics and trend analysis in the field to maximize process yield
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An article I wrote has been published in the December issue of "Measurement Technology" by Nippon Kogyo Shuppan.
The December issue of Japan Industrial Publishing's "Measurement Technology" introduces the product overview of the new MEMS Pirani vacuum gauge, the VersaTorr series, along with examples of its applications in advanced semiconductor processes.
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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.