Flow, pressure, steam, and vacuum products "Comprehensive Catalog" *Includes flow meters and more!
The lineup also includes Coriolis mass flow meters and our company's first pressure-based mass flow controllers.
This document is a comprehensive catalog featuring Brooks Instrument's flow, pressure, steam, and vacuum products. It includes pressure controllers such as the "SLA Series," which eliminates closed-loop, boost, and hysteresis, as well as thermal mass flow devices like the "GF40 Series," which can cover multiple gas types and flow ranges with a single unit, along with area flow meters, pressure/vacuum products, and more. This is a very informative book, so please take a look when considering implementation. 【Contents】 ■ Mass Flow & Pressure Controllers ■ Area Flow Meters ■ Pressure/Vacuum Products ■ Secondary Electronics & Software ■ Communication Protocols ■ Service & Support *For more details, please download the PDF or feel free to contact us.
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Solutions from Brooks Instrument that support a sustainable future.
Realizing Precision Control in Energy Innovation Hydrogen, fuel cells, CCUS, biofuels, CNT manufacturing. There are technologies on-site that monitor precise flows to support the energy of the future. Brooks Instrument's flow meters support the energy transition.
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Product Information: Pressure-Based Metal Seal Mass Flow Controller 'GP200 Series'
"Maximizing the Best Performance" This is the industry's first fully pressure-insensitive type of pressure-based mass flow controller (P-MFC) specifically designed for advanced etching and deposition processes in semiconductor manufacturing. The GP200 series P-MFC adopts a patented architecture that overcomes the limitations of conventional P-MFCs, enabling high-precision process gas supply even with low vapor pressure process gases. It also features a built-in differential pressure sensor and a unique design that places the valve downstream, allowing for high-precision process gas supply across the widest range of operating conditions in the industry. Due to its compatibility with a wide range of process conditions, it can be used as a replacement or upgrade for conventional P-MFCs and thermal MFCs. Additionally, by eliminating the need for components such as pressure regulators and converters, it simplifies the gas supply system and reduces costs. [Main Applications] ■ Semiconductor Manufacturing ■ Etching ■ CVD ■ Gas flow control applications requiring high-purity all-metal flow paths
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Our company provides products used in various fields, including heavy industry, oil and gas refining, research in chemistry and petrochemicals, production of pharmaceuticals and biopharmaceuticals, as well as manufacturing equipment for solar cells, LEDs, thin films, optical fibers, and semiconductors. By contributing to the environmental settings that enable process control and accurate measurements, we enhance the precision of our customers' processes, continuously supporting them to maintain their competitiveness while striving for mutual improvement, leading to the development and growth of their businesses. Please feel free to consult us if you have any requests.