ALICAT Mass Flow Meter MS (Corrosive Gas / Refrigerant Gas)
Achieving high-speed response with the laminar flow method (differential pressure type)! A wide range of models available from low flow to high flow.
The "MS Series" is a mass flow meter manufactured by ALICAT that can measure the flow of 130 types of gases, including corrosive gases and refrigerant gases, with a single unit. It provides accurate flow measurements of ±(0.8% Reading + 0.2% F.S.) and has a fast response time of 10ms, allowing it to quickly follow changes in flow. Additionally, it includes models like the "MW Series," which can measure with extremely low differential pressure. 【Features】 ■ 10ms fast response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Range from 0.5 SCCM to 3000 SLPM ■ Standard analog output and RS-232C communication ■ Standard backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Lineup (Excerpt)】 ■M Series (Standard Type) ■MS Series (Corrosive Gas/Refrigerant Gas Compatible) ■MW Series (Low Pressure Loss Type) ■MQ Series (High Pressure Type) ■MB/MBS/MWB Series (Portable Mass Flow Meters) ■PCU Series (Portable Calibration Unit) *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
Related Videos
catalog（5）
Download All Catalogs
News about this product（1）
Recommended products
Distributors
■ High-performance mass flow meter/controller M/MC series ■ Low-pressure loss mass flow meter/controller MW/MCW series ■ Corrosive gas and refrigerant gas compatible mass flow meter/controller MS/MCS series ■ Intrinsically safe explosion-proof mass flow meter/controller IS-Max series ■ Liquid flow meter/controller L/LC/LCR series ■ Vacuum shut-off valve equipped MCV/MCVS series ■ SEMI standard compliant valve built-in type MCE/MCES series ■ Dual valve MCD/MCRD series ■ Pressure gauge/pressure controller P/PC/PC3/PCD/PCR series ■ Intrinsically safe explosion-proof pressure gauge/pressure controller IS-Pro series ■ Thermal mass flow meter compact mass flow controller BASIS series ■ High-precision flow control for bioreactors BIO series ■ Coriolis high-pressure low-flow high-precision flow controller CODA series