ALICAT Mass Flow Controller MCE Series SEMI Standard
Mass flow controller with built-in valve from ALICAT, compliant with SEMI standards.
The "MCE/MCES series" is a mass flow controller manufactured by ALICAT, featuring a built-in valve that complies with SEMI standards. It achieves a fast response through a laminar flow method (differential pressure type). Equipped with a highly accurate differential pressure sensor, it measures flow rates precisely. 【Features】 ■ 100ms control response ■ High flow accuracy of ±(0.8% RD + 0.2% FS) ■ Lineup from 10 SCCM to 20 SLPM ■ Standard analog output and RS 232C communication ■ Compatible with mixed gases ■ Standard equipped with a backlit LCD display *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Lineup】 ■ MC/MCP/MCR Series (Standard Type) ■ MCS/MCRS Series (Corrosive Gas/Refrigerant Gas Compatible) ■ MCW/MCRW Series (Low Pressure Loss Type) ■ MCQ/MCRW Series (High Pressure Type) ■ MCE/MCES Series (SEMI Standards) ■ MCV/MCVS Series (Equipped with Shut-off Valve) ■ MCD/MCRD Series (Dual Valve) *For more details, please refer to the PDF materials or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
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