Equilibar Electronic Vacuum Regulator
Electronic vacuum regulator
Vacuum control is performed by command signals from a computer. The command signals are first sent to a small electronic regulator, from which a pilot signal is generated and sent to the reference port of the dome-shaped Equilibar vacuum regulator (EVR) to control the process pressure. Equilibar offers a series of high-precision electronic pressure regulators that provide this pilot reference signal. The QPV ultra-high resolution model and the EPR-30Hg model allow for precise adjustments due to their minimal hysteresis and deadband. These regulators can be used in open-loop mode or closed-loop mode. In open-loop mode, the vacuum setpoint is sent to the electronic pilot regulator by the computer signal, and the pilot regulator supplies the commanded pressure to the EVR reference port, maintaining the process vacuum very close to the setpoint. In open-loop mode, slight variations in vacuum pressure occur as the flow rate increases.
basic information
1/4 inch to 1 inch 0 to 30 inches Hg / 762 mmHg
Price range
Delivery Time
Applications/Examples of results
For more details, please download the PDF or feel free to contact us.
catalog（1）
Download All Catalogs
Recommended products
Distributors
■ High-performance mass flow meter/controller M/MC series ■ Low-pressure loss mass flow meter/controller MW/MCW series ■ Corrosive gas and refrigerant gas compatible mass flow meter/controller MS/MCS series ■ Intrinsically safe explosion-proof mass flow meter/controller IS-Max series ■ Liquid flow meter/controller L/LC/LCR series ■ Vacuum shut-off valve equipped MCV/MCVS series ■ SEMI standard compliant valve built-in type MCE/MCES series ■ Dual valve MCD/MCRD series ■ Pressure gauge/pressure controller P/PC/PC3/PCD/PCR series ■ Intrinsically safe explosion-proof pressure gauge/pressure controller IS-Pro series ■ Thermal mass flow meter compact mass flow controller BASIS series ■ High-precision flow control for bioreactors BIO series ■ Coriolis high-pressure low-flow high-precision flow controller CODA series