Annealing device
Annealing device
We would like to introduce the "annealing equipment" that we handle.
1～3 item / All 3 items
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RTA device
Supports tray transport! Achieves excellent substrate temperature distribution and gas flow method.
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Custom-made production achievements: Various vacuum devices
Conducting sample processing with a demo unit! We have a track record of "annealing equipment for research and development" and more.
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Pressurized RTA device
Maximum substrate heating temperature of 1000℃! Reduces element loss specific to the substrate surface heating process!
last updated