[Example of Use] Sputtering Target Composite Material SiC/Si
You are using SiC/Si composite materials as the target material.
It is a composite material containing SiC ceramic particles in Si alloy. It has higher bending rigidity than crystalline Si, and there is no occurrence of cracking or chipping during use, allowing for stable film formation until the end. With a film formation rate (deposition speed) 1.3 times that of crystalline Si targets, efficient film formation is possible.
basic information
It is a composite material containing SiC ceramic particles in a Si alloy. 【Features】 ○Specific gravity: 2.7 ○Bending strength: 240 MPa ○Low thermal expansion: 2.9 ppm/℃ ○High thermal conductivity: 110 W/mK ●For more details, please contact us or click to download the PDF.
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Applications/Examples of results
● LCD manufacturing equipment parts and inspection equipment parts ● Semiconductor manufacturing equipment parts and inspection equipment parts ● Optical system parts ● Various heat dissipation plates
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As a member of JGC Group, JFC challenges the possibilities of the material of fine ceramics with our own technologies. We actively engage in fundamental and applied research on ceramics, product application development, as well as manufacturing and sales. We respond to the diverse needs of various advanced industries with our unique technologies and products, including high-frequency ceramic substrates and circuit components, ceramic parts for industrial machinery, and the prototyping and development of metal-ceramic composite materials (MMC).