Micro-hole processing of Matal Matrix Composites for semiconductor equipment applications
Expansion into semiconductor-related products brought by micro-hole processing of Si/SiC composite materials with low thermal expansion and high thermal conductivity.
Fine hole processing on MMC (silicon/SiC composite materials) is possible through laser processing and electrical discharge machining. By applying fine hole processing to MMC, which features "low thermal expansion," "low resistance," "wear resistance," and "lightweight/high rigidity," it leads to the next step in improving device performance. <Specifications for Fine Hole Processing> [Hole Diameter] φ0.04 to φ0.25mm [Hole Pitch] 0.08 to 0.2mm Aspect ratio (hole diameter: depth) is approximately 1:20 *For more details, please download the catalog or contact us.
basic information
●Silicon/SiC Composite Materials Materials in which Si is impregnated into porous SiC 【SS501】→Ceramics: 50%, Si: 50% 【SS701】→Ceramics: 70%, Si: 30% 【SS702】→Ceramics: 75%, Si: 25% <Properties> ・Density: 3.0g/cm3 ・Bending Strength: 300–420MPa ・Young's Modulus: 280–350GPa ・Fracture Toughness: 3MPa·m^1/2 ・Coefficient of Thermal Expansion: 3.0x10^-6/K ・Thermal Conductivity: 175–190W/m·K ・Volume Resistivity: >2x10^-2Ω·cm <Composite Material Lineup> ■SA Series Casting (SA301, SA401) Aluminum alloy composite with 30–40 vol% SiC particles ■SA Series Impregnation (SA701) Aluminum infiltrated SiC porous ceramic composite (70vol%) ■SS Series Impregnation (SS501, SS701, SS702) Aluminum infiltrated SiC porous ceramic composite (50–75vol%)
Price range
Delivery Time
Applications/Examples of results
■Shower Plate An important component for uniformly ejecting and diffusing process gases in CVD and etching. ■Probe Card An important testing instrument that electrically connects the tester and the chip. ■Vacuum Chuck A fixture that uniformly holds ultra-thin wafers, films, and glass substrates without deformation or damage.
Related Videos
catalog（13）
Download All Catalogs
Recommended products
Distributors
As a member of JGC Group, JFC challenges the possibilities of the material of fine ceramics with our own technologies. We actively engage in fundamental and applied research on ceramics, product application development, as well as manufacturing and sales. We respond to the diverse needs of various advanced industries with our unique technologies and products, including high-frequency ceramic substrates and circuit components, ceramic parts for industrial machinery, and the prototyping and development of metal-ceramic composite materials (MMC).