Micro-hole processing of Matal Matrix Composites for semiconductor equipment applications
Expansion of semiconductor applications enabled by micro-hole machining on low thermal expansion, high thermal conductivity Si/SiC composite materials
Fine hole processing on MMC (silicon/SiC composite materials) is possible through laser processing and electrical discharge machining. By applying fine hole processing to MMC, which features "low thermal expansion," "low resistance," "wear resistance," and "lightweight/high rigidity," it leads to the next step in improving device performance. <Specifications for Fine Hole Processing> [Hole Diameter] φ0.04 to φ0.25mm [Hole Pitch] 0.08 to 0.2mm Aspect ratio (hole diameter: depth) is approximately 1:20 *For more details, please download the catalog or contact us.
basic information
●Silicon/SiC Composite Materials Materials in which Si is impregnated into porous SiC 【SS501】Ceramics: 50%, Si: 50% 【SS701】Ceramics: 70%, Si: 30% 【SS702】Ceramics: 75%, Si: 25% <Properties> ・Density: 2.8-3.0g/cm3 ・Bending Strength: 300–420MPa ・Young's Modulus: 280–350GPa ・Fracture Toughness: 3MPa·m^1/2 ・Coefficient of Thermal Expansion: 3.0x10^-6/K ・Thermal Conductivity: 175–190W/m·K ・Volume Resistivity: >2x10^-2Ω·cm <Composite Material Lineup> ■SA Series Casting (SA301, SA401) Aluminum alloy composite with 30–40 vol% SiC ■SA Series Impregnation (SA701) Aluminum infiltrated SiC porous ceramic composite (70vol%) ■SS Series Impregnation (SS501, SS701, SS702) Aluminum infiltrated SiC porous ceramic composite (50–75vol%)
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Applications/Examples of results
■Shower Plate Fabricating thousands of micro-holes with micronscale accuracy. ■Probe Card Producing numerous micro apertures designed for probe pin insertion. ■Vacuum Chuck Workpiece Deformation Suppression Using Micro-Pitch Micro-Holes.
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As a member of JGC Group, JFC challenges the possibilities of the material of fine ceramics with our own technologies. We actively engage in fundamental and applied research on ceramics, product application development, as well as manufacturing and sales. We respond to the diverse needs of various advanced industries with our unique technologies and products, including high-frequency ceramic substrates and circuit components, ceramic parts for industrial machinery, and the prototyping and development of metal-ceramic composite materials (MMC).