Takeda Industrial's batch-type wafer automatic cleaning device 'TWS Series'
Batch cleaning equipment utilizing cleaning technology and transport/control technology, compatible with various chemical solutions!
At Takeda Industrial, we utilize clean technology, transport/control technology, and other methods backed by years of experience to design and manufacture optimal equipment for our customers with our total engineering capabilities. Using various engineering tools, including 3D CAD, we deliver space-saving and user-friendly equipment. We offer a variety of devices, including wafer (RCA) cleaning equipment, precision parts cleaning equipment, ingot cleaning equipment, etching equipment, and IPA dryer equipment. *For more details, please refer to the PDF materials or feel free to contact us.
basic information
■Device Configuration - Chemicals Inorganic chemicals such as APM, HPM, SPM, organic chemicals such as IPA and developer solutions, as well as various cleaning solutions and functional water. - Transport State Cassette/Drum and carrierless (Note: There are two types of transport robots, upper and lower.) - Drying Spin dryer/Rinse dryer/IPA dryer (Note: IPA is an in-house product.) *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Model number/Brand name
Batch-type wafer automatic cleaning system "TWS Series"
Applications/Examples of results
Wafers, precision parts, ingots, etc.
