Takeda Industrial's IPA Steam Cleaning Device "TID Series"
IPA steam cleaning and drying equipment! Achieving clean drying for devices, wafers, glass, and parts!
At Takeda Industrial, we utilize clean technology, transport/control technology, and other methods backed by years of experience to design and manufacture optimal equipment for our customers with our total engineering capabilities. Using various engineering tools, including 3D CAD, we deliver space-saving and user-friendly equipment. The 'TID Series' device cleans and dries wafers in an IPA (isopropyl alcohol) vapor atmosphere and is equipped with an IPA quality control system and various safety systems. ■ Features - Clean drying using high-purity IPA is possible regardless of the material or shape, including devices, wafers, glass, and components. - Comprehensive safety measures including gas monitoring, N2 purging systems, automatic fire extinguishing systems, and emergency water injection systems in case of emergencies. - Clean drying using high-purity IPA is possible regardless of the material or shape. - The use of all stainless steel eliminates the risk of breakage. - Divided into paper zones and dry zones to reduce the use of IPA. *For more details, please refer to the PDF materials or feel free to contact us.
basic information
■Specifications Drying target: Equivalent to 6-inch, 1 cassette Silicon wafers, glass, parts, etc. Tank configuration: One layer of stainless steel steam drying tank Indirect heating method with aluminum heat block Device dimensions (WxDxH): 1,050 x 1,200 x 2,000 mm *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Model number/Brand name
IPA Steam Cleaning Device "TID Series"
Applications/Examples of results
Devices, wafers, glass, components, etc.
