L-type vacuum bellows hot valve "IVBH"

A vacuum valve with built-in heaters in the body exterior and inside the bellows! It can heat the valve body and bellows, reducing the adhesion of by-products!

last updated Nov 26, 2025

L-type vacuum bellows hot valve "IVBHK"

L-shaped vacuum bellows valve capable of heating up to 250℃! The mantle heater is equipped with a thermocouple and a protective thermostat to prevent abnormal heating.

last updated Mar 18, 2025

L-type vacuum bellows valve "IVB/IVBL"

Excellent corrosion resistance used in semiconductor manufacturing and compatible with a wide range of gas types! L-shaped vacuum valve with a simple structure that allows for maintenance.

last updated Nov 21, 2025

L-type vacuum bellows soft exhaust valve 'IVB/IVBL/IVBH'

A space-saving valve with a bypass valve and main valve integrated into a single structure for slow exhaust lines!

last updated Nov 21, 2025

Vacuum flange ball valve "BRW series"

This is a ball valve with an NW flange connection. It can be used at a maximum fluid temperature of 200°C!

last updated Mar 18, 2025

Digital Temperature Controller 'IVBH-C015'

Simultaneous heating of internal and external heaters is possible! PID control digital temperature controller for IVBH.

last updated Nov 26, 2025

Vacuum Butterfly Valve "IVWF Series"

A butterfly valve with a simple structure that can be installed in the vacuum exhaust line of semiconductor vacuum equipment!

last updated Nov 26, 2025

APC Butterfly Valve "PCA Series"

A structure that is difficult to contaminate inside the chamber! Reduces stress on the O-ring and achieves high durability performance.

last updated Nov 26, 2025

Square-shaped vacuum gate valve "UXG/LG series"

Can be set to any temperature up to 180℃! Maintenance periods can be significantly extended.

last updated Nov 26, 2025

Open/close indication magnetic proximity switch

Introducing a magnetic proximity switch that detects the open and closed states of valves for the IVB series!

last updated Nov 26, 2025

APC Butterfly Valve "PCVA Series"

Equipped with AUTO PID! APC butterfly valve that automatically adjusts to the specified target pressure.

last updated Apr 18, 2025

[Information] Introduction of valves used in equipment and facilities at semiconductor manufacturing plants.

From film formation to etching and cleaning! Introducing the valve conditions and product examples required for each process.

last updated Apr 07, 2026