High Purity Gas Diaphragm Valve "KD Series"
High-purity gases for semiconductor manufacturing processes! Pursuing extreme levels of sealing performance, durability, degassing performance, and corrosion resistance.
The "KD Series" is a highly reliable valve that achieves a high Cv value, is compatible with high-purity gases for semiconductors, and combines high durability with excellent corrosion resistance. By minimizing the vertical hole dimensions of the body and reducing the internal volume to 1.36 cm³, it realizes outstanding gas replacement characteristics. With the highest level of manufacturing environment and internal polishing treatment, it is designed to accommodate high-purity gases for semiconductors and pursues particle performance to the utmost limit. 【Features】 ■ Achieves excellent gas replacement characteristics by reducing the internal volume to 1.36 cm³ ■ Pursues high sealing performance, high durability, degassing performance, and corrosion resistance to the utmost limit ■ High corrosion resistance through carefully selected diaphragm materials and unique molding methods that eliminate individual differences to achieve high durability ■ Accommodates high-purity gases for semiconductors and pursues particle performance to the utmost limit #Pneumatics *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Lineup】 ■Straight Type ■Diverter Type ■Two-Step Valve ■High-Temperature (250℃) Compatible Valve ■LOTO Valve ■Quick Turn Valve *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
