Vacuum valve
Vacuum valve
This is an introduction to vacuum valves.
1～11 item / All 11 items
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L-type vacuum bellows hot valve "IVBH"
A vacuum valve with built-in heaters in the body exterior and inside the bellows! It can heat the valve body and bellows, reducing the adhesion of by-products!
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L-type vacuum bellows hot valve "IVBHK"
L-shaped vacuum bellows valve capable of heating up to 250℃! The mantle heater is equipped with a thermocouple and a protective thermostat to prevent abnormal heating.
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L-type vacuum bellows valve "IVB/IVBL"
Excellent corrosion resistance used in semiconductor manufacturing and compatible with a wide range of gas types! L-shaped vacuum valve with a simple structure that allows for maintenance.
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L-type vacuum bellows soft exhaust valve 'IVB/IVBL/IVBH'
A space-saving valve with a bypass valve and main valve integrated into a single structure for slow exhaust lines!
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Vacuum flange ball valve "BRW series"
This is a ball valve with an NW flange connection. It can be used at a maximum fluid temperature of 200°C!
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Digital Temperature Controller 'IVBH-C015'
Simultaneous heating of internal and external heaters is possible! PID control digital temperature controller for IVBH.
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Vacuum Butterfly Valve "IVWF Series"
A butterfly valve with a simple structure that can be installed in the vacuum exhaust line of semiconductor vacuum equipment!
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APC Butterfly Valve "PCA Series"
A structure that is difficult to contaminate inside the chamber! Reduces stress on the O-ring and achieves high durability performance.
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Square-shaped vacuum gate valve "UXG/LG series"
Can be set to any temperature up to 180℃! Maintenance periods can be significantly extended.
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Open/close indication magnetic proximity switch
Introducing a magnetic proximity switch that detects the open and closed states of valves for the IVB series!
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APC Butterfly Valve "PCVA Series"
Equipped with AUTO PID! APC butterfly valve that automatically adjusts to the specified target pressure.
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