L-type vacuum bellows hot valve "IVBHK"
L-shaped vacuum bellows valve capable of heating up to 250℃! The mantle heater is equipped with a thermocouple and a protective thermostat to prevent abnormal heating.
The "IVBHK" is an L-type vacuum bellows hot valve based on the structure of the "IVBH" series, capable of heating the gas contact section to a maximum temperature of 250°C. In addition to the external heater on the valve, it is also equipped with an internal heater within the bellows, allowing for heating of the valve body and bellows even when the valve is closed or open, thereby eliminating cold spots and preventing the adhesion of by-products. #By-product countermeasures Furthermore, a structure that reduces thermal impact on the air cylinder section and the use of Inconel bellows ensure a durability performance of over 1 million cycles. 【Features】 ■ Achieves 250°C heating of the gas contact section ■ Equipped with an internal heater in the bellows ■ Removable external heater *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Specifications (Excerpt)】 ■ Maximum Heating Temperature (Maximum Setting Temperature of Temperature Controller) - 25A Internal: 250℃ External: 260℃ - 40A Internal: 250℃ External: 270℃ ■ Temperature Control Method: Controlled by a temperature controller using K-type thermocouples ■ Operating Pressure: 1×10^-6 to 2×10^5 Pa (abs) [0.1MPa (G)] ■ Standard Materials - Body: SUS304 - Bellows: Inconel 625 - Actuator: Aluminum Alloy - Seat: Carletts 8900 *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
