L-type vacuum bellows soft exhaust valve 'IVB/IVBL/IVBH'
A space-saving valve with a bypass valve and main valve integrated into a single structure for slow exhaust lines!
The "IVB_X, VX" series prevents the swirling of particles generated inside the chamber. The main valve and bypass valve are integrated, suppressing rapid pressure fluctuations that occur when exhausting from atmosphere to vacuum or returning from vacuum to atmosphere. Pressure control is achieved through slow exhaust via the bypass valve before the main valve opens and closes. There are two types of bypass valves available: one with fixed flow rate and another with adjustable exhaust speed. This bypass valve is compatible with all "IVB," "IVBL," and "IVBH" series except for the 15A size. 【Features】 ■ The conventional slow exhaust line is integrated with the main valve. ■ Space-saving design. ■ Cost reduction for the exhaust line. ■ Multiple bypass valves can be installed depending on the model. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.
basic information
【Other Features】 ■ The conductance on the slow exhaust side can be adjusted as desired (VX type). ■ By selecting a heat-resistant specification for the bypass valve, it is possible to heat simultaneously in conjunction with the "IVBH" hot series. * For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
