Square-shaped vacuum gate valve "UXG/LG series"
Can be set to any temperature up to 180℃! Maintenance periods can be significantly extended.
The "UXG/LG Series" is a rectangular gate valve developed for partitioning between the reaction chamber and transfer chamber of semiconductor vacuum equipment. The body is made of aluminum and is operated by a double-acting air actuator. The heater-equipped version features not only external heating from a built-in external heater in the fixed body but also has a heater inside the movable valve body, allowing for heating from both the outside and inside, which provides excellent uniform heating performance. 【Features】 ■ Significantly extends maintenance intervals ■ Allows individual temperature settings for internal and external areas ■ Non-sliding structure that minimizes particle generation during valve opening and closing operations ■ Equipped with a latch lock mechanism to maintain valve closure ■ Offers various materials for the gate's O-ring, including fluororubber, KALREZ, and Chemraz *KITZ SCT provides various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Main Specifications (Partial)】 ■Size: 12" (300mm type) ■Operating Pressure: 1x10^-6Pa to 0.101MPa (abs) ■Seat Differential Pressure Resistance: 0.101MPa (forward and reverse pressure) ■Bellows Pressure Resistance: 0.02MPa (G) ■Valve Opening and Closing Tolerance Pressure: 1.3KPa *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
