Vacuum Butterfly Valve "IVWF Series"
A butterfly valve with a simple structure that can be installed in the vacuum exhaust line of semiconductor vacuum equipment!
The "IVWF Series" is a shut-off valve with a simple structure that can be installed in the vacuum exhaust line of semiconductor vacuum equipment. Its simple design features compactness and lightweight, making valve installation easy. The structure of the throttle valve allows for reproducibility of the opening degree through the scale of the micrometer handle, and fine adjustments can be made using a differential screw mechanism. 【Features】 ■ Compact and lightweight ■ Easy valve installation ■ Solves installation space issues with minimal spacing dimensions ■ Can be set to any opening degree with fixed screws ■ Allows for fine adjustments using a differential screw mechanism *KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Main Specifications (Partial)】 ■ Size: 25A, 50A, 80A, 100A ■ Orifice (mm): φ33, φ51.3, φ78, φ100 ■ Valve seat pressure differential: 0.101MPa (forward and reverse pressure) ■ Operating fluid temperature range: -15 to 100℃ ■ Operating durability: 100,000 cycles under atmospheric conditions *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
