APC Butterfly Valve "PCA Series"
A structure that is difficult to contaminate inside the chamber! Reduces stress on the O-ring and achieves high durability performance.
The "PCA Series" is a valve capable of opening and closing, slow exhaust, and pressure regulation. The newly developed seat ring mechanism eliminates issues such as twisting and detachment of the O-ring attached to the flapper. Additionally, the flapper seal section is grease-free, making it less likely to contaminate the reaction chamber. By adopting the seat ring mechanism, we have reduced stress on the O-ring and achieved high durability. 【Features】 ■ Capable of opening and closing valves, slow exhaust, and pressure regulation ■ Pressure adjustment possible from low vacuum to high vacuum ■ Utilizes a newly developed seat ring mechanism ■ High durability: 3 million cycles of full open and full close operation ■ Reduction of internal by-products through unique heating ■ Excellent adaptability to processes with high by-product generation *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Other Features】 ■ Valve Opening and Closing - The seat ring moves forward, and then the flapper rotates to open and close. ■ Slow Exhaust - The seat ring moves in the direction of the arrow, creating a gap with the flapper for exhaust. ■ Pressure Regulation - The combined action of the seat ring and flapper allows for excellent pressure adjustment from low vacuum to high vacuum. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
