APC Butterfly Valve "PCVA Series"
Equipped with AUTO PID! APC butterfly valve that automatically adjusts to the specified target pressure.
Introducing the APC Butterfly Valve [PCVA Series] equipped with AUTO PID control. This product is an integrated valve and controller type APC butterfly valve, suitable for use in vacuum exhaust lines for semiconductor manufacturing. In semiconductor manufacturing lines, minute fluctuations in temperature and pressure can significantly impact product quality, making high-precision control essential. AUTO PID control offers advantages in high-precision control, rapid response, long-term stability, and resistance to disturbances, contributing to the stabilization of required processes in semiconductor manufacturing. The APC Butterfly Valve [PCVA Series] equipped with AUTO PID control can automatically reach the specified target pressure, contributing to the optimization and efficiency of semiconductor manufacturing processes. Specifically, the following controls are possible: ■ Pressure Control: Automatically adjusts to the specified target pressure. ■ Target Change: Responds to changes in target pressure values during pressure control. ■ Flow Variation: Capable of pressure control for flow rates other than the learned flow rate. ■ Disturbance Impact: Converges to the target pressure even if the flow rate changes during target pressure control. ■ Position Shift Detection: Capable of detecting position shifts due to product adhesion or mechanical issues.
basic information
【Main Specifications (Partial)】 ■ Size: 40A, 50A ■ Operating Pressure: 1X10^-6Pa to 0.101MPa ■ Valve Seat Differential Pressure: 0.101MPa *For other specifications, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
Vacuum Exhaust Line for Semiconductor Manufacturing *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.
