Vacuum flange ball valve "BRW series"
This is a ball valve with an NW flange connection. It can be used at a maximum fluid temperature of 200°C!
The "BRW Series" is a vacuum flange ball valve that allows for disassembly, cleaning, and replacement of packing. Both manual and automatic valves are available. It uses high-performance, heat-resistant Hyper-Tite PTFE for the ball seat, making it suitable for use at fluid temperatures up to 200°C. The full-bore structure effectively reduces high conductance and the accumulation of by-products, making it suitable for exhaust lines of CVD equipment, among others. #By-product countermeasures 【Features】 ■ The full-bore structure suppresses high conductance and the accumulation of by-products. ■ Suitable for exhaust lines of CVD equipment and similar applications. ■ Uses high-performance, heat-resistant Hyper-Tite PTFE for the ball seat. ■ Usable at fluid temperatures up to 200°C. ■ Allows for disassembly, cleaning, and replacement of packing. *KITZ SCT offers various solutions for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Main Specifications】 ■ Fluid temperature: -10 to 200℃ ■ Operating pressure: 1×10^-6Pa(abs) to 6×10^5Pa(abs) [0.5MPa(G)] ■ Standard materials ・Body/Flange: SCS13A ・Ball: SUS304 ・Stem: SUS304 ・Ball seat: Hyper-tight PTFE ・Packing/Gasket: PTFE ■ Operating pressure: 0.4 to 0.7MPa(G) *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
