L-type vacuum bellows valve "IVB/IVBL"
Excellent corrosion resistance used in semiconductor manufacturing and compatible with a wide range of gas types! L-shaped vacuum valve with a simple structure that allows for maintenance.
The "IVB/IVBL" is an L-shaped vacuum valve that uses SUS304 for the body, ensuring durability and considering cost reduction, just like before. By reducing the number of components to the extreme, it achieves low costs and features a design that allows for easy maintenance. It has high leak performance due to its bellows seal structure. 【Features】 ■ The use of a stainless steel body provides excellent corrosion resistance and compatibility with a wide range of gas types. ■ The adoption of a square body enables cost reduction (IVB). ■ The use of a spherical body achieves high conductance performance (IVBL). ■ High leak performance is ensured by the bellows seal structure. *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.
basic information
【Specifications (Excerpt)】 ■ Operating Temperature: -15 to 100℃ (Actuator Max 70℃) ■ Operating Pressure: 1×10^-6 to 2×10^5 Pa (abs) [0.1MPa (G)] ■ Standard Materials ・ Body: SUS304 ・ Bellows: SUS316L ・ Actuator: A6063 (with built-in magnet for magnetic proximity switch) ・ Seat: Fluoro rubber *Other materials are also available upon request *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
