L-type vacuum bellows hot valve "IVBH"
A vacuum valve with built-in heaters in the body exterior and inside the bellows! It can heat the valve body and bellows, reducing the adhesion of by-products!
The IVBH series is an L-shaped vacuum valve that incorporates a spiral heater that follows the movement of the bellows, allowing for heating of the valve body and bellows even in the open and closed states. This valve can eliminate cold spots and minimize the adhesion of by-products by heating not only with an external heater but also from within the bellows. #By-product countermeasures The internal and external heaters have separate channels and can be heated to any temperature up to a maximum of 180°C. 【Features】 ■ Capable of maintaining long-term leak performance ■ Reduced generation of particles due to less product drop during movement ■ Achieves high durability of the bellows ■ Connection flanges can accommodate various connections such as "ISO KF" and "JIS VF/VG" ■ Options available include magnetic proximity open/close switches and thermostats *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Other Features】 ■ It is possible to attach the specified connection connector to the cables of the heater, thermocouple, thermostat (optional), and magnetic proximity switch (optional). ■ Supports special specifications such as mounting brackets, special spacers, special flanges, special materials (body, bellows, sealing materials), and air fittings. *For more details, please refer to the PDF document or feel free to contact us.
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For more details, please refer to the PDF document or feel free to contact us.
