High-temperature resistant valve SCV submersible valve 'KD-S series'
Usable with a variety of gases in semiconductor manufacturing processes in high-temperature environments (up to 200℃)! A design concept that takes customer usability into consideration!
The "KD-S Series" is a diaphragm valve that incorporates unique technology, making it suitable for use in high-temperature environments. It is ideal for supplying precursors in atomic layer deposition (ALD) processes, where reproducibility of flow rate is required. By adopting a resin sheet, the durability performance in high-temperature environments, such as sheet leaks and lifecycle, has improved compared to metal sheet types. 【Features】 ■ Compatible with high-temperature environments ■ No product errors, ensuring compatibility after replacement ■ Stable and reproducible gas flow rates can be obtained ■ PFA, which excels in heat resistance and corrosion resistance, is used as the sheet material ■ Improved durability performance in high-temperature environments, such as sheet leaks and lifecycle *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Design Concept Considerate of Customer Usability】 <Automatic Valve> ■ Design optimized for jacket heater installation - By placing the actuator's air vent hole on the top surface, it allows the jacket heater to be closely attached to the valve side, minimizing heat loss. <Manual Valve> ■ Heat-resistant handle design that allows visual confirmation of the open/close state - By making the handle and open/close display board of the operation part heat-resistant, it eliminates the need to remove the handle during the dehydration process when cleaning material containers, allowing for bake-out. - When using a constant temperature bath with a vapor supply system, the open/close state can also be confirmed through a viewing window. *For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
【Purpose】 ■Precursor supply for Atomic Layer Deposition (ALD) process *For more details, please refer to the PDF document or feel free to contact us.*
