High Purity Gas Series Compact Diaphragm Valve 'VLCD Series'
Inherits the basic performance of the "KD series" and achieves a 20% reduction in size! Usable for manufacturing equipment for semiconductors, FPD, LEDs, etc.!
The "VLCD Series" is a diaphragm valve that inherits the basic performance of the conventional "KD Series" while implementing commonality of parts. By reviewing each component and material, we have achieved a low-cost price. The cleaning and inspection processes are equivalent to those of the conventional products, making it suitable for use in manufacturing equipment for semiconductors, FPDs, and LEDs. 【Features】 ■ Implements commonality of parts while inheriting the performance of the conventional "KD Series" ■ Achieves a 20% reduction in external dimensions compared to the conventional "KD Series" ■ Reviews of each component and material have been conducted to achieve a low-cost price ■ Usable in manufacturing equipment for semiconductors, FPDs, and LEDs #Pneumatics *For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Product Material】 ■Body: SUS316L ■Seat: PCTFE ■Diaphragm: Cobalt Alloy *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF document or feel free to contact us.
Price range
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Applications/Examples of results
【Applications】 ■Manufacturing equipment for semiconductors, FPD, LEDs, etc. *For more details, please refer to the PDF document or feel free to contact us.
