High Purity Gas Diaphragm Valve "VLD Series"
Minimization and simplification of drive components achieved! A diaphragm valve that supports high-purity gases for semiconductors and pursues particle performance to the limit.
The "VLD Series" is a diaphragm valve that is based on the "KD Series," designed to pursue ease of use and simplicity. While maintaining the basic performance, materials, and cleanliness, we have reviewed the components, changed the processing methods, and reduced the number of parts to achieve safety and low prices. With the highest level of manufacturing environment and internal polishing treatment, we have addressed high-purity gases for semiconductors and pursued particle performance to the extreme. 【Features】 ■ Minimization and simplification of drive components ■ Achieving safety and low prices ■ Cleaning and inspection processes are equivalent to the conventional model ■ Reliability and durability performance remain unchanged ■ Addressing high-purity gases for semiconductors and pursuing particle performance to the extreme *KITZ SCT offers various proposals for fluid-related concerns in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Product Materials】 ■Body: SUS316L, SUS316LE (double melted material) ■Sheet: PCTFE, PFA, PI ■Diaphragm: Cobalt alloy * PFA and PI sheets are only compatible with manual valves. * For more details, please refer to the PDF document or feel free to contact us.
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Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
