High-pressure compatible high-purity gas diaphragm valve "VRD Series"
For high-pressure gas lines and internal piping in semiconductor manufacturing processes! The height of all sizes has been reduced by 6mm compared to conventional products, making them more compact.
The "VRD Series" is a 1/4" high-pressure direct diaphragm valve that supports an enclosed gas pressure of 20.6 MPa. Maintaining the same performance as the conventional "RD Series," it reduces the number of components to achieve a lower price. The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact. It can be used in gas lines and piping within equipment where complete prevention of high pressure and high vacuum retention, as well as leakage to the outside air, is desired. 【Features】 ■ Supports enclosed gas pressure of 20.6 MPa ■ Achieves a lower price by reducing the number of components while maintaining the same performance as the conventional model ■ Reduces operating torque compared to the "RD Series" ■ The height of all sizes has been shortened by 6 mm compared to the conventional model, making it more compact ■ Easier to use than ever due to low torque and compact design *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
basic information
【Product Materials】 ■Body: SUS316L, SUS316LE (double melted material) ■Seat: PCTFE ■Diaphragm: Cobalt alloy *For more details, please refer to the PDF document or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
【Usage】 ■ Gas lines (cylinder cabinet, BSGS) ■ Piping within equipment, etc. *For more details, please refer to the PDF document or feel free to contact us.
