High Purity Gas System ZERO Volume Valve 'ZCD Series'
Minimize the dead volume inside the valve to the absolute limit! This is a diaphragm valve with extremely good gas exchange characteristics. The lift part (ASSY) is replaceable.
The "ZCD Series" is a diaphragm valve that minimizes the internal volume (dead volume) within the valve to the extreme, enhancing gas replacement characteristics. To prevent vacuum closure of the diaphragm and improve the opening speed, the lift (ASSY) component forcibly lifts the diaphragm. Additionally, the lift (ASSY) component can be replaced on the user side. 【Features】 ■ By minimizing the dead volume from the seat to the main flow path when the valve is closed, it achieves exceptionally good gas replacement characteristics. ■ To prevent vacuum closure of the diaphragm and improve the opening speed, the lift (ASSY) component forcibly lifts the diaphragm. ■ The lift (ASSY) component can be replaced on the user side. #Dead Space *For more details, please refer to the PDF document or feel free to contact us.
basic information
【Product Materials】 ■Body: SUS316L, SUS316LE (double melted material) ■Seat: PCTFE ■Diaphragm: Cobalt alloy *KITZ SCT offers various solutions for fluid-related issues in semiconductor manufacturing. For more details, please refer to the PDF materials or feel free to contact us.
Price range
Delivery Time
Applications/Examples of results
For more details, please refer to the PDF document or feel free to contact us.
